Solar cell related equipment
MIMASU has leveraged expertise gained through the processing and cleaning of our own semiconductor silicon wafers to develop equipment capable of achieving higher quality and thinner wafers for solar cells.
■Spin etcher for solar cells PV-MSE
- Automatic spinning processing of crystalline wafers for solar cells (etching, rinsing, drying)
- 50-wafer capacity cassette, 1-carrier conveyance
- Wafer size: □156/126 mm, t = 100 to 200 μm
- Processing of upper surface only possible without chemical working its way round to rear surface (PAT: W02006/059382)
- Chemicals can be recovered and reused
- Processing capability enhancement possible through modularity
■Acid etching machine for solar cells PAET-T01
- Processing by automatic conveyance of crystalline wafers for solar cells (etching, rinsing, drying)
- Teflon 50-wafer capacity cassette, 1-carrier conveyance
- Wafer size: □156 mm, t = 120 to 200 μm
- Acid TEX also possible by changing chemical solution
- Wafer retention mechanism: standard equipment
- Processing capability enhancement possible by changing tank configuration
◎Integrated production line for solar cell wafers
It is possible to construct integrated production lines from the coarse cleaning to texture etching processes that follow wire sawing.
Course cleaning, stiffener detachment machine
Wafer sheet detachment machine
Final cleaning machine
Texture etching machine
■Wafer sheet detachment machine for solar cells PVSP-1S
- Single-crystal wafers for solar cells are separated from stack and stored in cassette
- Wafer size: □156 mm, t = 120 to 200 μm
- Stable processing of thin wafers
- Wafer crack detection and ejection function