Chemical feeders
MIMASU’s chemical feeders are high-quality products that have been realized by applying the know-how acquired through our company's wafer processing processes to design, and aggressively pursuing the various functions required of actual equipment.
■MSP Series
- Safer, automatic feeding of high cleanliness chemicals
- Customization based on quantity of chemicals used
- Recirculating filtration system with temperature control function
- Equipped with safety check function using various sensors (temperature, leakage, exhaust, etc.)
- Selectable stock solution replenishment method (PE bottle, canister, etc.)
- Selectable chemical feed method (pump feed, N2 pumping, etc.)
- Compatible with various chemicals
Acids (mixed acid, sulfuric acid, hydrochloric acid, hydrofluoric acid, hydrogen peroxide solution), alkalis (ammonia, caustic soda), organic solutions (resist stripper, etc.), slurries (abrasives), etc.