Spin Processors
Contributing to a decarbonized society
A spin processor is a piece of equipment used to carry out surface treatment by dripping chemical solution while rotating wafers one at a time. IGBT power semiconductors manufactured using this equipment are electronic devices indispensable to electric and hybrid vehicles, and play a vital role in driving motors and charging and discharging batteries.
Product lineup
■MSE Series spin etchers
- Compatible with silicon etching and all kinds of metal etching after backgrinding
- IR system (real-time) and EL system (rate management) can be selected as wafer thickness end detection functions
(PAT: JP4364242) - Simultaneous rinsing of front and rear surfaces is possible by stabilizing warped thin wafers with fin chucks
(PAT: JP4625495) - Stable handling of thin wafers is possible with a “hanging hand”
- Efficient chemical solution separation and recovery function
(PAT: JP4257816)
■MSC Series spin cleaners
- Supports various types of cleaning including resist stripping, polymer residue removal, and metal impurity cleaning
- 2 fluid cleaning, ultrasonic cleaning function, addition of ozone
- Compatible with simultaneous cleaning of front and rear surfaces
MSE4000／MSC4000
- 2 chamber treatment
- Compatible with 6- and 8-inch wafers
- Temperature control and recovery cycle are possible for up to 2 chemical solutions
MSE5000／MSC5000
- 2 chamber treatment
- Compatible with 8- and 12-inch wafers
- Temperature control and recovery cycle are possible for up to 2 chemical solutions
MSE6000／MSC6000
- 4 chamber treatment
- Compatible with 6- and 8-inch wafers
- Temperature control and recovery cycle are possible for up to 2 chemical solutions
MSE9000／MSC9000
- 8 chamber treatment
- Compatible with 12-inch wafers
- Temperature control and recovery cycle are possible for up to 2 chemical solutions