Cleaning equipment
MIMASU’s wafer cleaning equipment comprises a group of products capable of achieving the highest levels of quality and productivity by applying know-how acquired through our company's wafer processing processes to designs.
■Multi-tank carrier-less batch type cleaning unit
- Advanced cleaning by carrier-less conveyance such as pre-diffusion cleaning
- Dramatically reduced chemical and pure water consumption
- Dramatically smaller footprint
- Lineup of 5, 13, or 25 wafer sheets conveyed per batch
- Employs hot water drawing and IR drying system (infrared heater)
- Compatible with FOUP cassettes at loader and unloader
■Silica tube cleaning equipment MQC Series
- Fully-automated cleaning process
- Equipped with silica tube rotation mechanism as standard
- Equipped with attachment for cleaning silica tube accessories as standard
- Compatible with silica tubes for 4-, 5-, 6-, 8-, and 12-inch wafers